The curvilinear data preparation flow must enable curvilinear mask generation. The Calibre nmCLBIAS software performs pre-OPC retargeting for curvilinear designs with enhanced capabilities that differentiate it from traditional pre-OPC retargeting tools.
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Calibre nmCLBIAS is a curvilinear version of production-hardened Calibre nmBIAS tool, which has been used by major foundries for over 12 years. Calibre nmCLBIAS is a scalable and efficient retargeting tool that provides biasing solutions for curvilinear designs.
Calibre nmCLBIAS provides rule-based biasing/retargeting for curvilinear designs with improved edge filtering for classification, enhanced edge movement engine, and gradual fragment smoothing at corners.
The Calibre nmCLBIAS retargeting engine provides scalable and efficient pre-OPC retargeting and biasing solutions to meet customer runtime requirements.
Calibre nmCLBIAS is easy to use and flexible, allowing user-defined fragmentation control, tag-based biasing, biasing-rule table specification, and interpolation of biasing rules and more.
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