The Calibre CMPAnalyzer tool lets designers use simulation results to visually highlight and examine a variety of CMP effects. Designers can examine these results layer by layer, and for selected areas in the layout. They can also review specified CMP hotspot checks, such as depth of focus checks.
Using thickness simulation data from the simulator, the Calibre CMPAnalyzer tool determines the optimum filling strategy and passes the information to the Calibre YieldEnhancer tool. The combination of accurate simulation data and the innovative Calibre fill algorithm improves parametric yield while minimizing the added capacitance.
Data provided by CMP simulators to the Calibre CMPAnalyzer tool enable designers to visually highlight and examine a variety of CMP effects. Designers can examine these results layer by layer, and for selected areas in the layout. They can also review specified CMP hotspot checks, such as depth of focus checks.
The Calibre CMPAnalyzer tool integrates with Calibre xRC parasitic extraction to create a comprehensive 3D model of the interconnect parameters that more closely matches silicon results. The Calibre xRC tool accurately accounts for the thickness variation across the design, letting designers use this information to validate timing.
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